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The company offers a variety of micromachined calorimetric mass flow sensors for medical, instrumentation, automation and others. The sensors also opt for multi-parameter sensing in the compact format. Please click on the button for performance, interface and package information.

This FS4300 series of mass flow sensors are the upgrade version of the best seller FS4000. The upgrades including the company's Thermal-D sensing chip, much improved flow conditioning and interfaces. The products can be applied to many flow sensing applications.

FS1100 sensors utilize the company's Thermal-D sensing, that allows limited removal of gas sensitivity and more precise measurement with a gas conversion factor that can be calculated with the gas diffusivities. Examples are gas measurement in medical ventilators.

The new FS3000 series mass flow sensors are built with the company's Thermal-D sensing chip, and are particularly designed for automation process control. It has the lowest pressure loss for the market products, while having high accuracy. The series covers a full scale flow from 500 sccm to 1500SLPM.