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MEMS mass flow sensors and meters for clean gases





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The MEMS mass flow sensors are made with the company's proprietary MEMS mass flow sensing technology featuring large dynamic range, high accuracy and long life time. The MEMS sensing elements are designed with a pressure balancer that allows the applications at high working pressures.


The newly developed thermal time-of-flight sensing offers the unprecedented performances and enabled with multi-parameter sensing capability.


Typical applications include,


1. Medical devices or equipment, such as ventilator, anesthesia equipment, asthma detector, autospirometers, endoscope, gamma knife, CPAP, and many more

2. Process control and monitor, such as wielding process, gas mixers, food package robot control clogging sensing fan monitoring and many more

3. Instrumentation, such as GC spectrometers, gas control equipment, air samplers, leak detection, gas analyzer, and many more

4. Semiconductor equipment, such as die-attachment, wire bonder, wet chemical bench monitor

5. Smart home/HVAC, provides the monitoring of the ventilation in hoods and feedback for efficiency.


The MEMS mass flow meters are built on the flow sensors with advanced user interfaces, wireless data ready for IoT, sophisticated package and can also apply for a large flow channel metrology requirements. The company's technology also enables the meter to automatically recognize the pre-programmed flow media which is not available for other similar products on market. Typical applications include,


1. Medical oxygen metering and control, provides in particular for hospital oxygen delivery system

2. Process control, such as beverage production, manufacture gas process, and others

3. Natural gas or other fuel gas, such as control of the combustion efficiency

4. Coal bed gas initiator, provides the tracer for the initiation of the drilled coal bed to facilitate the efficiency of the production

5. Smart cylinder gas meters, are specially developed for facilitating the gas cylinder consumption, leakage, dispatch, inventory and manufacture. The incorporated IOT technology enables the system to be truly smart.



MEMS TOF sensors for microfluidic metering





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The MEMS time-of-flight (TOF) flow sensors are made with the company's proprietary MEMS flow sensing technology that is particularly for microfluidic metering applications. The products features a large dynamic range, high accuracy and long life time. The MEMS sensing elements are designed and packaged with a cost effective process that allows the disposable options for super high volume applications. Typical applications include,


1. Drug delivery, such as infusion pumps, anesthesia equipment, and many more

2. Physiological fluid monitor, such as digital urine bags and many more

3. Instrumentation, such as blood analyzer, IV analyzer, and many more

4. 3D printers, provides the control of liquid materials in-flow

5. Pharmaceutical process control, provides the monitoring of the trace liquid concentration process monitor.

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MEMS Pressure sensors and gas sensors





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Siargo now offers integrated pressure sensor with dual pressure sensing elements and gas concentration sensors. With the advanced thermal parameter sensing technologies, Siargo is now offering gas concentration measurement for dual gas mixture. Our gas sensors are often integrated with the flow and pressure sensors in a compact package that offers value-added features for customers as a turn-key solution.


The dual pressure sensors utilize both piezo and thermal sensing technology in a compact package that is ideal for miniaturized device applications, such as portable CPAP applications.


For detailed information, please contact Siargo.

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