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Flow Sensors, Meters & Mass Flow Controllers
Microfluidic and Liquid Sensors
Pressure Sensors and Concentration Sensors

Mass Flow sensors



For clean gas flow applications



FS6122 mass flow sensors



For CPAP and other applications





This product integrated mass flow, pressure, temperature and humidity sensors in a single package for CPAP and other applications.


Datasheet

FS1015 mass flow sensors



For medical and other applications





This sensor is designed for medical applications such as ventilators. It can also be used for general purpose flow measurement with threaded adapters.


Datasheet

fS4001 mass flow sensors



For instrumentation and other applications





The sensors are designed for instrumentation such as GC and others. It can also be used for the general purpose flow measurement under 1000 sccm.


Datasheet

FS4000 mass flow sensors



For medical and other applications





The products can be used for medical applications and many others. Examples are anesthesia, endoscope, gas mixture, wielding gas process. The connectors can be exchangeable.


Datasheet

FS5001 mass flow sensors



For instrumentation and manifold





The sensors are designed for instrumentation and/or manifold assembly. It has two version - low flow up to 1000sccm high flow to 4SLPM.


Datasheet

FS8000 mass flow sensors



For equipment and process control





The sensors provide the fastest response to 1 msec, and it is best for automation, robot control and or other instrumentation applications.


Datasheet

FS7002 mass flow sensors



For open space flow speed metering





These sensors are used for free space gas flow speed measurement, and also applicable for clog sensing for filters.


Datasheet

AM1000 mass flow meters



For HVAC and other applications





These products are designed for environmental probe with integration of temperature and humidity sensors. The air flow is calibrated in a wind-tunnel.


Datasheet

FS6100 mass flow sensors



For industrial processing applications





The sensors are designed for industrial process flow monitor or measurement applications, flow up to 10000SLPM, and pressure up to 1.0MPa.


Datasheet

FS5200 mass flow sensors



For equipment and process control





The sensors provide the lowest flow sensing capability for leakage and replacement of mechanical detectors.


Datasheet
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