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  • MEMS Sensing Products: Flow, Microfluidic, Pressure and Gas

fS4001 mass flow sensors





For instrumentation and other applications



The sensors are designed for instrumentation such as GC and others. It can also be used for the general purpose flow measurement under 1 SLPM.





The sensor provides precision mass flow under 1SLPM, and the full scale can be fully customized with the 1 SLPM


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